Print

Pelletier, Keith

Electrical Engineering

2009

MS

Nanoscale structures have gained much attention of recent and are becoming more important with advances in electronics. Ruthenium dioxide (RuO₂) nanorods are among these structures that have gained attention, and they are of particular interest because of their physical and chemical properties. Among these properties are its low electrical resistivity and its great ability to act as a catalyst. This low electrical resistivity is also attractive for use in field emissive displays. RuO₂ nanorods may also be of use as a substrate material. This thesis focuses on the growth of RuO₂ nanorods on multiple substrate materials and process conditions. Among these substrate materials are Si(100), aluminized silicon, stainless steel, titanium, and Pyrex. Also, an analysis of RuO₂ nanorod growth as a function of time was performed to investigate the growth mechanism of the RuO₂ nanorods.